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Metal Seal Pressure Meters and Controllers are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability. Furthermore they distinguish themselves by a high surface quality and are therefore especially suitable for meeting the semiconductor industry requirements as well as other high purity gas applications. The base blocks of the Pressure Meters and Controllers have 1/4" face seal male (VCR) connections. lowest range 2 ... 100 mbar (0,029 ... 1,43 psi) absolute or relative highest range 1,28 ... 64 bar (18 ... 900 psi) absolute or relative
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  • Resealable metal-to-metal outer seal construction (no rings) 
  • Electropolished wetted parts
  • Cleanroom assembled
  • Analog and digital I/O, with optionally integrated interface to
    DeviceNet™, Profibus-DP®, Modbus-ASCII/RTU, EtherCAT®or FLOW-BUS
  • High accuracy and repeatability
  • Stable control, even at varying process volumes

Both Mass Flow Meters/Controllers and Pressure Meters/Controllers are applied across a huge range of applications e.g. in the fabrication of gas compositions, for CVD and PVD, optical glass coatings, LED production, in vacuum technology and solar power (Photo-Voltaic) element manufacturing and also in semiconductor processes such as ion implantation, etching processes and atomic layer deposition (ALD). Depending on the chemical properties of the process gases and the level of particle cleanliness required, equipment builders often prefer to apply metal sealed equipment over those with elastomeric seals. Bronkhorst High-Tech has many years of experience, supplying precise and reliable instruments for demanding high-purity applications, distinguishing themselves by unique metal-to-metal seals with excellent resealing capability.

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