Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.
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  • Resealable metal-to-metal outer seal construction (no rings) 
  • Electropolished wetted parts
  • Cleanroom assembled
  • Analog and digital I/O, with optionally integrated interface to
    DeviceNet™, Profibus-DP®, Modbus-ASCII/RTU, EtherCAT®or FLOW-BUS
  • High accuracy and repeatability
  • Stable control, even at varying process volumes

Both Mass Flow Meters/Controllers and Pressure Meters/Controllers are applied across a huge range of applications e.g. in the fabrication of gas compositions, for CVD and PVD, optical glass coatings, LED production, in vacuum technology and solar power (Photo-Voltaic) element manufacturing and also in semiconductor processes such as ion implantation, etching processes and atomic layer deposition (ALD). Depending on the chemical properties of the process gases and the level of particle cleanliness required, equipment builders often prefer to apply metal sealed equipment over those with elastomeric seals. Bronkhorst High-Tech has many years of experience, supplying precise and reliable instruments for demanding high-purity applications, distinguishing themselves by unique metal-to-metal seals with excellent resealing capability.

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